Coating equipment for transparent parts
Product Introduction
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It is applicable to the preparation of surface coatings for both organic glass and inorganic glass. ITO thin films and anti-reflective films can be deposited on the surface of the substrates, possessing good electrical conductivity and light transmittance.
The equipment can be equipped with systems such as direct current power supplies, intermediate frequency power supplies, radio frequency power supplies, ion power supplies, and High-Power Impulse Magnetron Sputtering (Hipims) systems. Customized combinations can be made according to users' technological applications to meet the needs of different users.
Due to the relatively poor heat resistance of organic glass, it is necessary to be equipped with specialized heating systems, such as infrared heaters or thermal radiation heaters. The temperature can be precisely controlled through the control system.
Advantages and benefits
Excellent film layer uniformity；
Conduct profiling motion according to the product structure；
The performance of the film layer can be precisely controlled
Technical indicators
| Device Model | SP-1000SI | SP-1200SI | SP-1500SI | SP-1800SI |
| Vacuum Chamber Size (mm) | 1000×1000 | 1200×1200 | 1500×1500 | 1800×1800 |
| Maxium vacuum | 5.0E-4Pa | |||
| Air Extraction time | Ambient Pressure to 5.0E-3Pa in less than 20mins | |||
| Pressure Rise Rate | 1h≤0.5Pa | |||
| Vacuum Pump Set | Dry screw pump + Oil-free Roots Pump + Magnetic levitation molecular pump | |||
| Heating System | Infrared heaters with zoned temperature control. The temperature can be controlled and adjusted from room temperature to 400℃. | |||
| Air lnjection System | Mass flow controller(1-6 set) | |||
| Target | Planar target、Pillar Sputtering Taret | |||
| Power Supply | MF Power Supply、DC Power Supply、RF Power Supply、Hipims | |||
| Workpiece Rotation Method | Profile-following motion/Reciprocating oscillation/Rotational motion linked with the target. | |||
| Operating Method | Manual+Semi-Automatic+Fully Automatic+PLC+IPC | |||
| Note | Specifications can be fully customized according to customer's product and recipe requirements | |||
Application area
Fax：86-10-83865286
Postal Code：101102
Add：No. 35 Jingsheng South Second Street, Jinqiao Technology Industrial Base, Majuqiao Town, Tongzhou District, Beijing
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